Over half a century after the discovery of the piezoresistive effect, microsystem technology has experienced considerable developments. Expanding the opportunities of microelectronics to non-electronic systems, its number of application fields continues to increase. Microsensors are one of the most important fields, used in medical applications and micromechanics. Microfluidic systems are also a significant area, most commonly used in ink-jet printer heads. This textbook focuses on the essentials of microsystems technology, providing a knowledgeable grounding and a clear path through this well-established scientific dicipline. With a methodical, student-orientated approach, Introduction to Microsystem Technology covers the following: microsystem materials (including silicon, polymers and thin films), and the scaling effects of going micro; fabrication techniques based on different material properties, descriptions of their limitations and functional and shape elements produced by these techniques; sensors and actuators based on elements such as mechanical, fluidic, and thermal (yaw rate sensor components are described); the influence of technology parameters on microsystem properties, asking, for example, when is the function of a microsystem device robust and safe? The book presents problems at the end of each chapter so that you may test your understanding of the key concepts (full solutions for these are given on an accompanying website). Practical examples are included also, as well as case studies that enable a better understanding of the technology as a whole. With its extensive treatment on the fundamentals of microsystem technology, this book also serves as a compendium for engineers and technicians working with microsystem technology.

Over half a century after the discovery of the piezoresistiveeffect, microsystem technology has experienced considerabledevelopments. Expanding the opportunities of microelectronics tonon-electronic systems, its number of application fields continuesto increase. Microsensors are one of the most important fieldsused in medical applications and micromechanics. Microfluidicsystems are also a significant area, most commonly used in ink-jetprinter heads.This textbook focuses on the essentials of microsystemstechnology, providing a knowledgeable grounding and a clear paththrough this well-established scientific dicipline. With amethodical, student-orientated approach, Introduction toMicrosystem Technology covers the following:* microsystem materials (including silicon, polymers and thinfilms), and the scaling effects of going micro;* fabrication techniques based on different material propertiesdescriptions of their limitations and functional and shape elementsproduced by these techniques;* sensors and actuators based on elements such as mechanicalfluidic, and thermal (yaw rate sensor components aredescribed);* the influence of technology parameters on microsystemproperties, asking, for example, when is the function of amicrosystem device robust and safe?The book presents problems at the end of each chapter so thatyou may test your understanding of the key concepts (full solutionsfor these are given on an accompanying website). Practical examplesare included also, as well as case studies that enable a betterunderstanding of the technology as a whole. With its extensivetreatment on the fundamentals of microsystem technology, this bookalso serves as a compendium for engineers and technicians workingwith microsystem technology.

Preface.List of Symbols.List of Abbreviations.1 Introduction.1.1 What is a Microsystem?1.2 Microelectronics and Microsystem Technology.1.3 Areas of Application and Trends of Development.1.4 Example: Yaw Rate Sensor.2 Scaling and Similarity.2.1 Scaling.2.2 Similarity and Dimensionless Numbers.3 Materials.3.1 Overview.3.2 Single Crystalline Silicon.3.3 Glasses.3.4 Polymers.3.5 Thin Films.3.6 Comparison of Material Characteristics.4 Microfabrication.4.1 Overview.4.2 Cleanliness During Production.4.3 Lithography.4.4 Thin-film Formation.4.5 Layer Patterning.4.6 Anisotropic Wet Chemical Deep Etching.4.7 Doping.4.8 Bonding Techniques.4.9 Insulation Techniques.4.10 Surface Micromachining.4.11 Near-surface Micromachining.4.12 HARMST.4.13 Miniaturized Classical Techniques.4.14 Selection of Microtechnical Manufacturing Techniques.5 Packaging.5.1 Tasks and Requirements.5.2 Functions of Packaging.6 Function and Form Elements in MicrosystemTechnology.6.1 Mechanical Elements.6.2 Fluidic Elements.6.3 Thermal Elements.7 Sensors and Actuators.7.1 Reversible and Parametric Transducers.7.2 Transducers for Sensors and Actuators.8 Design of Microsystems.8.1 Design Methods and Tools.8.2 Systems with Lumped Parameters.8.3 Systems with Distributed Parameters.9 Effect of Technological Processes on MicrosystemProperties.9.1 Parameter-based Microsystem Design.9.2 Robust Microsystem Design.10 The Future of Microsystems.10.1 Status and Trends in Microsystem Technology.10.2 Microoptical Applications.10.3 Probe Tips.10.4 RF Microsystems.10.5 Actuators.10.6 Microfluidic Systems.10.7 Chemical, Biological and Medical Systems.10.8 Energy Harvesting and Wireless Communications.10.9 Micro Fuel Cells.References.Appendix A Physical Constants.Appendix B Coordinate Transformation.B.1 Elastic Coefficients.B.2 Piezoresistive Coefficients.References.Appendix C Properties of Silicon Dioxide and Silicon NitrideLayers.References.Appendix D Nomenclature of Thin-film Processes.Reference.Appendix E Adhesion of Surface MicromechanicalStructures.E.1 Capillary Forces.E.2 Critical Length of Cantilever Springs.Reference.Index.