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Madou, M: From MEMS to Bio-MEMS and Bio-NEMS
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Format:
284x215x45 mm
Beschreibung:
University of California, Irvine, USA
From Traditional Manufacturing to Nanotechnology: Nonlithography-Based (Traditional) and Lithography-Based (Nontraditional) Manufacturing Compared. Nature as an Engineering Guide Biomimetics. Nanotechnology: Top-Down and Bottom-Up Manufacturing Approaches Compared. Packaging, Assembly, and Self-Assembly. Selected Materials and Processes for MEMS and NEMS. Metrology and MEMS/NEMS Modeling. Scaling Laws, Actuators, and Power and Brains in Miniature Devices: Scaling Laws. Actuators. Power and Brains in Miniature Devices. Miniaturization Application: MEMS and NEMS Applications.
"In Part I we compare available manufacturing options for MEMS and NEMS, introduce inspection options for the produced parts (metrology) and summarize available modeling software for MEMS and NEMS. Of the three Chapters in Part II, the first deals with scaling laws, the second with actuators, and the third discusses issues surrounding power generation and the implementation of brains in miniaturized devices. In Part III, Chapter 10 we review the MEMS and NEMS markets"--