che-chandler.de
|
| Der Artikel wird am Ende des Bestellprozesses zum Download zur Verfügung gestellt. |
LOW ENERGY ION ASSISTED FILM GROWTH
ISBN-13:
9781848161320
Veröffentl:
2003
Seiten:
300
Autor:
Agustin Gonzalez-elipe
eBook Typ:
PDF
eBook Format:
Reflowable
Kopierschutz:
Adobe DRM [Hard-DRM]
Sprache:
Englisch
Beschreibung:
This book is an introductory manual for Ion Assisted Deposition (IAD) procedures of thin films. It is addressed to researchers, post-graduates and even engineers with little or no experience in the techniques of thin film deposition. It reviews the basic concepts related to the interaction of low energy ion beams with materials. The main procedures used for IAD synthesis of thin films and the main effects of ion beam bombardment on growing films, such as densification, stress, mixing, surface flattening and changes in texture are critically discussed. A description of some of the applications of IAD methods and a review of the synthesis by IAD of diamond-like carbon and cubic-boron nitride complete the book.