This book covers the state of the art of laser micro- and nanotechnology. The physical fundamentals of different processes and the application are presented. The book deals with different materials like phase change and memory alloys, thin films, polymers etc. New phenomena and mechanisms of laser-matter interaction in nano-domains are explained. This book is helpful for students, postgraduates, engineers and researches working not only in the field of laser microtechnology but also in high-tech industry, like photonics, microelectronics, information technology.

Laser 3d Nanolithography.- A Decade of Advances in Femtosecond Laser Fabrication: Mechanisms and Applications.- Photophysics of Nanostructured Metal and Metal-Contained Composite Films.- Light Scattering by Small Particles and Their Light Heating: New Aspects of the Old Problems.- Ultrafast Laser-Induced Confined Microexplosion: A New Route to Form Super-Dense Material Phases.- Phase-Structure Changes in Optical Materials under Laser Action.- Fs Laser Induced Reversible and Irreversible Processes in the Material Bulk.- Laser Decontamination: Problems and Prospects.- Atomistic Modeling of Generation of Crystal Defects and Microstructure Development in Short-Pulse Laser Processing of Metals. Optical Breakdown in Ambient Gas and its Role in Material Processing by Short-Pulsed Lasers.- Laser –Induced Local Oxidation :Theory, Experiment and Applications.- Laser Nanostructuring of Polymers.- Selective Ablation of Thin Films by Short-Laser Pulses.- Laser Crystallization of Metals.