System-level modeling of MEMS - microelectromechanical systems - comprises integrated approaches to simulate, understand, and optimize the performance of sensors, actuators, and microsystems, taking into account the intricacies of the interplay between mechanical and electrical properties, circuitry, packaging, and design considerations. Thereby, system-level modeling overcomes the limitations inherent to methods that focus only on one of these aspects and do not incorporate their mutual dependencies. The book addresses the two most important approaches of system-level modeling, namely physics-based modeling with lumped elements and mathematical modeling employing model order reduction methods, with an emphasis on combining single device models to entire systems. At a clearly understandable and sufficiently detailed level the readers are made familiar with the physical and mathematical underpinnings of MEMS modeling. This enables them to choose the adequate methods for the respective application needs. This work is an invaluable resource for all materials scientists, electrical engineers, scientists working in the semiconductor and/or sensor industry, physicists, and physical chemists.

System-level modeling of MEMS - microelectromechanical systems - comprises integrated approaches to simulate, understand, and optimize the performance of sensors, actuators, and microsystems, taking into account the intricacies of the interplay between mechanical and electrical properties, circuitry, packaging, and design considerations. Thereby, system-level modeling overcomes the limitations inherent to methods that focus only on one of these aspects and do not incorporate their mutual dependencies.The book addresses the two most important approaches of system-level modeling, namely physics-based modeling with lumped elements and mathematical modeling employing model order reduction methods, with an emphasis on combining single device models to entire systems. At a clearly understandable and sufficiently detailed level the readers are made familiar with the physical and mathematical underpinnings of MEMS modeling. This enables them to choose the adequate methods for the respective application needs.This work is an invaluable resource for all materials scientists, electrical engineers, scientists working in the semiconductor and/or sensorindustry, physicists, and physical chemists.

PHYSICAL AND MATHEMATICAL FUNDAMENTALS FOR COMPACT MODELING OF MEMSSystem-Level Modeling of MEMS by Lumped-Elements - Physical BackgroundSystem-Level Modeling of MEMS by Means of Model Order Reduction - Mathematical BackgroundModal Reduction - Mathematical BackgroundIssues in MEMS MacromodelingAPPLICATIONS OF MODEL REDUCTION BASED SYSTEM LEVEL MODELING OF MEMSApplication of Parametric Model Reduction for MEMS System-Level Simulation and DesignApplication of Nonlinear Model Order Reduction for MEMS System-Level SimulationModel Order Reduction for Circuit Level Simulation of RF MEMS Frequency Selective DevicesA Reduced-Order Model for Electrically Actuated MicroplatesCombination of Analytical Models and Order Reduction Methods for System Level Modeling of GyroscopesAPPLICATIONS OF LUMPED ELEMENT BASED SYSTEM LEVEL MODELING OF MEMSSystem-level Modeling of Energy-Harvesting modulesIntertial MEMS Design with Higher Order Sigma-Delta Control CircuitsMacro-Modeling of Systems Including Free-Space Optical MEMSA System-Level Model for a Silicon Thermal Flow SensorSystem-Level Modeling and Simulation of Force-Balance MEMS AccelerometersSystem-Level Simulation of a Micromachined Electrometer using a Time-Domain Variable Capacitor Circuit ModelModeling and System-Level Simulation of a CMOS Convective AccelerometerSystem-Level Modeling of MEMS Based on SABER PlatformsVHDL Implementation of a communication interface for integrated MEMSHeterogenous (Optics, Fluidics) System-Level DesignENABLING TECHNIQUES FOR SYSTEM LEVEL MODELING OF MEMSManufacturable and EDA Compatible MEMS Design via 3D Parametric librariesMEMS Related Design Optimizing of SiPEfficient Optimization of Transient Dynamic Problems in MEMSModeling and Synthesis Tools for Analog Circuit Design