Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps. Sensor systems, microreactors, nanostructures, nanomachines, functional surfaces, integrated optics, displays, communications technology, biochips, human/machine interfaces, prosthetics, miniaturized medical and surgery equipment and many more opportunities are being explored. This new series, Advanced Micro & Nanosystems, provides cutting-edge reviews from top authors on technologies, devices and advanced systems from the micro and nano worlds.

This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional siliconprocessing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in massdata storage and electrochemical imaging by means of scanning micro- and nanoprobes.The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS-based DNA sensor arrays, respectively.

PREFACEM3: THE THIRD DIMENSION OF SILICONTRENDS IN MEMS COMMERCIALIZATIONCAPACITIVE INTERFACES FOR MEMSPACKAGING OF ADVANCED MICRO- AND NANOSYSTEMSHIGH-FREQUENCY INTEGRATED MICROELECTROMECHANICAL RESONATORSMEMS IN MASS STORAGE SYSTEMSSCANNING MICRO- AND NANOPROBES FOR ELECTROCHEMICAL IMAGINGNANOFLUIDIC MODELING AND SIMULATIONNANOFLUIDICS ? STRUCTURES AND DEVICESCARBON NANOTUBES AND SENSORS: A REVIEWCMOS-BASED DNA SENSOR ARRAYS