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CMOS-MEMS
ISBN-13:
9783527675067
Veröffentl:
2013
Einband:
E-Book
Seiten:
608
Autor:
Oliver Brand
Serie:
2, Advanced Micro and Nanosystems
eBook Typ:
PDF
eBook Format:
Reflowable E-Book
Kopierschutz:
Adobe DRM [Hard-DRM]
Sprache:
Englisch
Beschreibung:
This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of MEMS is covered from all angles. The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first place, rather than having a hybrid solution.
This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world ofMEMS is covered from all angles.The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the firstplace, rather than having a hybrid solution.
Fabrication TechnologyMaterial CharacterizationMonolithically Integrated Inertial SensorsCMOS?MEMS Acoustic DevicesRF CMOS MEMSCMOS-based Pressure SensorsCMOS-based Chemical SensorsBiometric Capacitive CMOS Fingerprint Sensor SystemsCMOS-based Biochemical Sensing SystemsCMOS-based Thermal SensorsCircuit and System Integration