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Resonant MEMS
Fundamentals, Implementation, and Application
E-Book
Sofort lieferbar | Lieferzeit: Sofort lieferbar I
ISBN-13:
9783527676354
Veröffentl:
2015
Einband:
E-Book
Seiten:
512
Autor:
Oliver Brand
Serie:
11, Advanced Micro and Nanosystems
eBook Typ:
EPUB
eBook Format:
Reflowable E-Book
Kopierschutz:
Adobe DRM [Hard-DRM]
Sprache:
Englisch
Beschreibung:
Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.
A must-have for any MEMS R&D group: for the first time fundamental and hard-to-come-by knowledge is combined in one ready reference.The book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then goes on to provide a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the latest applications of resonant MEMS, such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.
PART I. FUNDAMENTALSFundamental Theory of Resonant MEMS DevicesFrequency Response of Cantilever Beams Immersed in Viscous FluidsDamping in Resonant MEMSParametrically-Excited Micro- and NanosystemsFinite Element Modeling of ResonatorsPART II. IMPLEMENTATIONCapacitive DevicesPiezoelectric Resonant MEMSResonant MEMS Electrothermal ExcitationNanoelectromechanical Systems (NEMS)Organic Resonant MEMS DevicesDevices with Embedded ChannelsHermetic Packaging for Resonant MEMSCompensation, Tuning and Trimming of MEMS ResonatorsPART III. APPLICATIONSMEMS Inertial SensorsResonant MEMS Chemical SensorsBiosensorsFluid Properties SensorsEnergy Harvesting Devices