The authoritative reference on catalytic chemical vapor deposition, written by the inventor of the technology. This comprehensive book covers a wide scope of Cat-CVD and related technologies from the fundamentals to the many applications, including the design of a Cat-CVD apparatus. Featuring contributions from four senior leaders in the field, including the father of catalytic chemical vapor deposition, it also introduces some of the techniques used in the observation of Cat-CVD related phenomena so that readers can understand the concepts of such techniques. Catalytic Chemical Vapor Deposition: Technology and Applications of Cat-CVD begins by reviewing the analytical tools for elucidating the chemical reactions in Cat-CVD, such as laser-induced fluorescence and deep ultra-violet absorption, and explains in detail the underlying physics and chemistry of the Cat-CVD technology. Subsequently it provides an overview of the synthesis and properties of Cat-CVD-prepared inorganic and organic thin films. The last parts of this unique book are devoted to the design and operation of Cat-CVD apparatuses and the applications. Provides coherent coverage of the fundamentals and applications of catalytic chemical vapor deposition (Cat-CVD) Assembles in one place the state of the art of this rapidly growing field, allowing new researchers to get an overview that is difficult to obtain solely from journal articles Presents comparisons of different Cat-CVD methods which are usually not found in research papers Bridges academic and industrial research, showing how CVD can be scaled up from the lab to large-scale industrial utilization in the high-tech industry. Catalytic Chemical Vapor Deposition: Technology and Applications is an excellent one-stop resource for researchers and engineers working on or entering the field of Cat-CVD, Hot-Wire CVD, iCVD, and related technologies.

The authoritative reference on catalytic chemical vapor deposition?written by the inventor of the technologyThis comprehensive book covers a wide scope of Cat-CVD and related technologies?from the fundamentals to the many applications, including the design of a Cat-CVD apparatus. Featuring contributions from four senior leaders in the field?including the father of catalytic chemical vapor deposition?it also introduces some of the techniques used in the observation of Cat-CVD related phenomena so that readers can understand the concepts of such techniques.Catalytic Chemical Vapor Deposition: Technology and Applications of Cat-CVD begins by reviewing the analytical tools for elucidating the chemical reactions in Cat-CVD, such as laser-induced fluorescence and deep ultra-violet absorption, and explains in detail the underlying physics and chemistry of the Cat-CVD technology. Subsequently it provides an overview of the synthesis and properties of Cat-CVD-prepared inorganic and organic thin films. The last parts of this unique book are devoted to the design and operation of Cat-CVD apparatuses and the applications.Provides coherent coverage of the fundamentals and applications of catalytic chemical vapor deposition (Cat-CVD)Assembles in one place the state of the art of this rapidly growing field, allowing new researchers to get an overview that is difficult to obtain solely from journal articlesPresents comparisons of different Cat-CVD methods which are usually not found in research papersBridges academic and industrial research?showing how CVD can be scaled up from the lab to large-scale industrial utilization in the high-tech industryCatalytic Chemical Vapor Deposition: Technology and Applications is an excellent one-stop resource for researchers and engineers working on or entering the field of Cat-CVD, Hot-Wire CVD, iCVD, and related technologies.

INTRODUCTIONThin Film TechnologiesBirth of Cat-CVDResearch History of Cat-CVD and Related TechnologiesStructure of this bookFUNDAMENTALS FOR STUDYING ON PHYSICS OF CAT-CVD AND DIFFERENCE FROM PECVDFundamental Physics in Deposition ChamberFundamental Difference between Cat-CVD and PECVD ApparatusesFeatures of Conventional PECVDDrawback of PECVD and Technology Overcoming ThemFeatures of Cat-CVD as Technology Overcoming Drawback of PECVDFUNDAMENTALS FOR ANALYTICAL METHODS FOR REVEALING CHEMICAL REACTIONS IN CAT-CVDImportance of Radical Process in CVD ProcessesRadical Detection TechniqueOne-Photon Laser Induced Fluorescence (LIF)Two-Photon Laser Induced FluorescenceSingle Path VUV Laser AbsorptionOther Laser Spectroscopic TechniquesMass Spectrometric TechniquePHYSICS AND CHEMISTRY OF CAT-CVDKinetics of Molecules in ChambersGas Temperature Distribution in Cat-CVD ChambersDecomposition Processes on Metal Wire SurfacesModel of Decomposition of SiH4 on Metal SurfacesSummary: Film Deposition Mechanisms in Cat-CVDPROPERTIES OF FILMS PREPARED BY CAT-CVDProperties of Amorphous-Silicon (a-Si)Crystallization of Silicon Films and Micro-Crystalline SiliconProperties of Silicon-Nitride (SiNx)Formation and Properties of SiOxNyProperties of Silicon-Dioxide (SiO2) Prepared by Cat-CVDProperties of Aluminum-Oxide (Al2O3)Properties of Other Inorganic FilmsSummary: What can be made by Cat-CVD?ORGANIC POLYMER SYNTHESIS BY CAT-CVD RELATED TECHNOLOGY - INITIATED CVD (I-CVD)PTFE Synthesis by Cat-CVD Related TechnologyVarious Organic Films Prepared by Cat-CVD Related Technology and i-CVDSources and Deposition Conditions for Synthesized Various Organic FilmsMechanism of Organic Film Formation by i-CVDSummary and Future Prospect of i-CVDPHYSICS AND TECHNOLOGIES FOR OPERATING CAT-CVD APPARATUSESInfluence of Gas Flow in Cat-CVD ApparatusesFactors Deciding Film UniformityLimit of Packing Density of Catalyzing WiresThermal Radiation from Heated CatalyzersContamination from Heated CatalyzersLifetime of Catalyzing Wires and Techniques to Expand LifetimeChamber CleaningMass-Production MachinesAPPLICATIONS OF CAT-CVD FILMSSolar CellsThin Film Transistors (TFT)Surface Passivation on Compound Semiconductor DevicesGas Barrier Films for Various Devices Such As Organic DevicesGas Barrier Films for Food PackagesULSI Application of Cat-CVD SiNx FilmsOther Applications of Inorganic FilmsTypical Application of Organic FilmsSummary of Various Application and Future ProspectsRADICALS GENERATED IN CAT-CVD APPARATUS AND THEIR APPLICATIONGeneration of High Density Hydrogen (H) AtomsCleaning and Etching by H Atoms Generated in Cat-CVD ApparatusesPhoto-Resist Removal by Hydrogen AtomsLow Temperature Formation of Low Resistivity Metal Lines from Liquid Inks by H AtomsLow Temperature Surface Oxidation and Nitridation"Cat-Sputtering" - A New Thin Film Deposition Utilizing RadicalsA NEW LOW TEMPERATURE IMPURITY DOPING TECHNOLOGY- CAT-DOPINGInvention of Cat-DopingLow Temperature and Shallow Phosphorus (P) Doping into c-SiLow Temperature Boron (B) Doping into c-SiLow Temperature Nitrogen Doping into Silicon-Carbide (SiC)Feasibility of Cat-Doping for Various ApplicationsSUMMARY AND FUTURE PROSPECTS OF CAT-CVD