This book describes state-of-the-art micromachining of transparent materials which, due to the nonlinear absorption mechanism of ultrashort pulses, allows unique three-dimensional capabilities and is exploitable for fabrication of complex microsystems.

Femtosecond laser micromachining of transparent material is a powerful and versatile technology. In fact, it can be applied to several materials. It is a maskless technology that allows rapid device prototyping, has intrinsic three-dimensional capabilities and can produce both photonic and microfluidic devices. For these reasons it is ideally suited for the fabrication of complex microsystems with unprecedented functionalities. The book is mainly focused on micromachining of transparent materials which, due to the nonlinear absorption mechanism of ultrashort pulses, allows unique three-dimensional capabilities and can be exploited for the fabrication of complex microsystems with unprecedented functionalities.This book presents an overview of the state of the art of this rapidly emerging topic with contributions from leading experts in the field, ranging from principles of nonlinear material modification to fabrication techniques and applications to photonics and optofluidics.

Part I: Introductory concepts and characterization.- Fundamentals of femtosecond Laser micromachining in transparent materials.- Ultrafast imaging of plasma dynamics and material response during micromachining.- Spectroscopic characterization of waveguides.- Optimizing Laser-induced refractive index changes in bulk optical materials via spatio-temporal beam shaping.- Controlling the cross-section of ultrafast Laser inscribed waveguides.- Anisotropy of femtosecond Laser writing Part II: Waveguides and optical devices in glass.- Passive optical waveguide devices in glass.- Femtosecond Laser inscription of fibre gratings.- 3-D Bragg grating waveguide devices.- Active photonic devices Part III: Waveguides and optical devices in other transparent materials.- Waveguides in crystalline materials.- Refractive index structures in polymers Part IV: Microsystems and applications.- Discrete optics in waveguide arrays.- Optofluidics for biosensing.- Microstructuring of Photosensitive glass.- Microsystems and sensors.- Ultrashort Laser joining and welding.