This comprehensive handbook has become the definitive reference work in the field of nanoscience and nanotechnology, and this 4th edition incorporates a number of recent new developments.

It integrates nanofabrication, nanomaterials, nanodevices, nanomechanics, nanotribology, materials science, and reliability engineering knowledge in just one volume. Furthermore, it discusses various nanostructures; micro/nanofabrication; micro/nanodevices and biomicro/nanodevices, as well as scanning probe microscopy; nanotribology and nanomechanics; molecularly thick films; industrial applications and nanodevice reliability; societal, environmental, health and safety issues; and nanotechnology education.

In this new edition, written by an international team of over 140 distinguished experts and put together by an experienced editor with a comprehensive understanding of the field, almost all the chapters are either new or substantially revised and expanded, with new topics of interest added. It is an essential resource for anyone working in the rapidly evolving field of key technology, including mechanical and electrical engineers, materials scientists, physicists, and chemists.

Introduction.- Micro/Nanofabrication Techniques.- Nanomaterials and Nanostructures.- MEMS/NEMS.- BioMEMS/NEMS.- Nanometrology.- Bio/Nanotribology and Bio/Nanomechanics.- Molecularly-Thick Films for Lubrication.- Biomimetics and Bioinspired Surfaces.- Micro/Nanodevice Reliability.- Nanotechnology in Social Context, Environments, Health and Safety Issues, and Nanotechnology Education.